Patent number: 9036968
Adiabatic mode-profile conversion by selective oxidation for photonic integrated circuit
Original Assignee: Innolume GmbH
Field of technology: Industrial Machinery and Processes, Optics
Patent granted on: Tue, 19 May 2015
Abstract
Waveguide designs and fabrication methods provide adiabatic waveguide eigen mode conversion and can be applied to monolithic vertical integration of active and passive elements in PICs. An advantage of the designs and methods is a simple fabrication procedure with only a single etching step in combination with subsequent well-controllable selective oxidation. As a result, improved manufacturability and reliability can be achieved.