Method for preventing facet coating overspray
Patent No. 5,989,637
Issued: November 23, 1999
Inventor: John S. Rizzo, Oley, PA; Gustav Derkits, Jr., New Providence, NJ; Raymond Gruszka, Reading, PA; and John Boyd, Blandon, PA
Assignee: Lucent Technologies, Inc.
A method and apparatus for preventing overspray onto bonding pads of a laser bar during facet coating includes manufacturing inserts with gaskets that are aligned with the laser bar such that the gaskets mask off the bonding pads during the facet coating process so that no overspray onto the bonding pads occurs. The gaskets are preferably made of gold with a thin titanium coating to prevent thermal compression bonding with the bonding pads. The inserts with gaskets are preferably manufactured using standard wafer processing techniques. The gaskets are preferably formed using the compliant layer metalization process described in U.S. Pat. No. 5,559,817.
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